Yuri Subota. List of publications.

Soviet Union author's certificates (patents):

1.G.E.Domashev, I.A.Primachenko, Yu.V.Subota, V.A.Sterligov, Yu.M.Shirshov, "Method of silicon wafer defects' registration"

Soviet Union author's certificate N1764417, 08.21.1990 (in Russian)

2.V.A.Gorba, A.I.Karpluk, I.A.Primachenko, V.I.Sokolenko, V.A.Sterligov, Yu.V.Subota, Yu.M.Shirshov, "Set-up for defects' registration on polished surface"

Soviet Union author's certificate N1777007, 06.11.1990 (in Russian)

3.V.A.Sterligov, Yu.V.Subota, Yu.M.Shirshov, "Set-up for defects' registration"

Soviet Union author's certificate N1662234, 08.14.1989 (in Russian)

4.V.A.Gorba, A.I.Karpluk, I.A.Primachenko, V.I.Sokolenko, V.A.Sterligov, Yu.V.Subota, Yu.M.Shirshov, "Set-up for defects' registration on flat polished surface"

Soviet Union author's certificate N1662233, 11.15.1988 (in Russian)

5.V.A.Sterligov, Yu.V.Subota, Yu.M.Shirshov, "Set-up for defects' registration on surface of round objects"

Soviet Union author's certificate N1509694, 04.13.1987 (in Russian)

6. V.A.Sterligov, Yu.V.Subota, Yu.M.Shirshov, "Method of microparticles' size determination "

Soviet Union author's certificate N1402853, 12.08.1986 (in Russian)

7.B.A.Nesterenko, O.V.Snitko, V.A.Sterligov, Yu.V.Subota, Yu.M.Shirshov, "Set-up for polished surface defects detection"

Soviet Union author's certificate N1448876, 08.04.1986 (in Russian)

8.V.A.Sterligov, Yu.V.Subota, Yu.M.Shirshov, "Set-up for optical surface defects detection"

Soviet Union author's certificate N1326004, 07.30.1985 (in Russian)

9.Yu.V.Subota, O.S.Frolov, "MOS-transistor"

Soviet Union author's certificate N1088609, 11.03.1982 (in Russian)

Publications:

1.V.A.Sterligov, G.E.Domashev, Yu.M.Shirshov, Yu.V.Subbota, S.V.Svechnikov Investigation of silicon wafer surface monatomic structure by elastic light scattering The physics and chemistry of Sio2 and Si-Sio2 interface - 3, Proc.vol.96-1, p.604-613 (1996)

2.V.A.Sterligov, G.E.Domashev, Yu.M.Shirshov, Yu.V.Subbota, S.V.Svechnikov Investigation of silicon wafers surface monatomic structure by elastic laser light scattering, Proc. of Third symposium on the physics and chemistry of SIO2 and the SI-SIO2 interface (189th Meeting of the Electrochemical Society) May 5-10, 1996, Los Angeles, California, USA

3.S.A.Kostioukevich, Yu.M.Shirshov, E.P.Matsas, A.V.Stronski, Yu.V.Subbota, V.I.Chegel and P.E.Shepelyavi Application of surface plasmon resonance for the investigation of ultrathin metal films. SPIE proceeding of internaional Conference OPTDIM'95, Kiev, 1995, vol.2648. p.144-151.

4.Shirshov Yu.M., Chegel V.I., Subbota Yu.V., Matsas E.P.Surface Plasmon Resonance peculiarities for thin organic films, SPIE Proceeding of internationalconference OPTDIM`95, Kiev,1995vol 2648 p.118-123.

5.G.E.Domashev, Yu.M.Shirshov, V.A.Sterligov, Yu.V.Subbota, S.V.Svechnikov, Atomic structure display of real silicon surface under light scattering, Appl. Opt. v.34, no 13, pp.2367-2371 (1995) [ 1 May 1995 ]

6.G.E.Domashev, Yu.M.Shirshov, V.A.Sterligov, Yu.V.Subbota, S.V.Svechnicov, On the informative possibility of light scattering method for structural perfection testing of both silicon surface and near surface layer, Proc. SPIE v.2113, p.202-210 1994

7.N.V.Artyschuk, V.A.Gorba, A.I.Karplyuk, I.A.Primachenko, V.A.Sterligov, Yu.V.Subbota, Yu.M.Shirshov "ADELAR"- Device for controlling of silicon wafer, Elektronnaya promyshlennost, 1990, N12, p.40-43 (in Russian)

8.Yu.V.Subbota, I.A.Primachenko, Yu.M.SHirshov V.A.Sterligov, A.I.Karplyuk, Scanning laser device for controlling of silicon wafer contaminations.//Inform. listok VIMI o nauchno-texn. dostijenii.- N89-2879 (in Russian)

9.V.A.Gorba, A.I.Karplyuk, I.A.Primachenko, V.A.Sterligov, Yu.V.Subbota, Yu.M.Shirshov, Scanning Laser Devices for Controlling Silicon Wafers Surface, Electr. Promyshl. 1989, N6, p.32-33 (in Russian)

10.G.E.Domashov, B.A.Nesterenko, O.V.Snitko, V.A.Sterligov, Yu.V.Subbota, Yu.M.Shirshov,Light Scattering by a Sphere on Semiconductor Surface, Doklady AN UkrSSR. Acad.Sci., Ser.A, N12, p.40-42 (in Russian)